Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough...Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough was fabricated and installed co-planar with the anode elec- trode, allowing non-invasive observations perpendicular to the plasma sheath. The principal ex- cited species flowing towards the grounded electrode were identified and, by assuming Boltzmann distributions, the vibrational temperature of the molecules on the X1 ∑＋/g and C3Ⅱu levels was estimated under various operating conditions.展开更多
Nitrogen dual-frequency capacitively coupled plasmas （DF-CCPs） with different fre- quency configurations, i.e., 60/2 MHz and 60/13.56 MHz, are investigated by means of opticM emission spectroscopy （OES） and a floa...Nitrogen dual-frequency capacitively coupled plasmas （DF-CCPs） with different fre- quency configurations, i.e., 60/2 MHz and 60/13.56 MHz, are investigated by means of opticM emission spectroscopy （OES） and a floating double probe. The excited nitrogen molecule ion N＋（B） is monitored by measuring the emission intensity of the （0,0） bandhead of the first neg- ative system （FNS） at 391.44 nm. It is shown that in the discharge with 60/13.56 MHz, the N＋ emission intensity decreases with the increase in pressure. In the discharge with 60/2 MHz, however, an abnormal enhancement of N＋ emission at higher pressure is observed when a higher power of 2 MHz is added. Variation in the ion density shows a similar dependence on the gas pressure. This indicates that in the discharge with 60/2 MHz there is a mode transition from the alpha to gamma type when a higher power of 2 MHz is added at high pressures. Combining the measurements using OES and double probe, the influence of low frequency on the discharge is investigated and the excitation route of the N＋（B） state in the discharge of 60/2 MHz is also discussed.展开更多
An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the ex...An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species （atomic helium, atomic oxygen and metastable oxygen） generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2（b1∑g^＋） are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity （777.4 nm） between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.展开更多
文摘Optical emission spectroscopy parallel to the axis of a low-pressure radio-frequency discharge in nitrogen was realized, i. e. end-on instead of customary side-on measurements. A specially designed optical feedthrough was fabricated and installed co-planar with the anode elec- trode, allowing non-invasive observations perpendicular to the plasma sheath. The principal ex- cited species flowing towards the grounded electrode were identified and, by assuming Boltzmann distributions, the vibrational temperature of the molecules on the X1 ∑＋/g and C3Ⅱu levels was estimated under various operating conditions.
基金supported by National Natural Science Foundation of China (Nos.10635010, 10775103)
文摘Nitrogen dual-frequency capacitively coupled plasmas （DF-CCPs） with different fre- quency configurations, i.e., 60/2 MHz and 60/13.56 MHz, are investigated by means of opticM emission spectroscopy （OES） and a floating double probe. The excited nitrogen molecule ion N＋（B） is monitored by measuring the emission intensity of the （0,0） bandhead of the first neg- ative system （FNS） at 391.44 nm. It is shown that in the discharge with 60/13.56 MHz, the N＋ emission intensity decreases with the increase in pressure. In the discharge with 60/2 MHz, however, an abnormal enhancement of N＋ emission at higher pressure is observed when a higher power of 2 MHz is added. Variation in the ion density shows a similar dependence on the gas pressure. This indicates that in the discharge with 60/2 MHz there is a mode transition from the alpha to gamma type when a higher power of 2 MHz is added at high pressures. Combining the measurements using OES and double probe, the influence of low frequency on the discharge is investigated and the excitation route of the N＋（B） state in the discharge of 60/2 MHz is also discussed.
基金The project partially supported by National Natural Science Foundation of China (No. 10335040)
文摘An atmospheric pressure plasma jet （APPJ） using radio-frequency （13.56 MHz） power has been developed to produce homogeneous glow discharge at low temperature. With optical emission spectroscopy, we observed the excited species （atomic helium, atomic oxygen and metastable oxygen） generated in this APPJ and their dependence on gas composition ratio and RF power. O and O2（b1∑g^＋） are found in the effluent outside the jet by measuring the emission spectra of effluent perpendicular to the jet. An interesting phenomenon is found that there is an abnormal increase of O emission intensity （777.4 nm） between 10 mm and 40 mm away from the nozzle. This observation result is very helpful in practical operation.
