This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to...This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of nass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.展开更多
Vacuum pressure vessels are one of the critical components in the aerospace field,and understanding the mechanical behavior feature is particularly important for safe operation.Therefore,it is meaningful to obtain the...Vacuum pressure vessels are one of the critical components in the aerospace field,and understanding the mechanical behavior feature is particularly important for safe operation.Therefore,it is meaningful to obtain the stress and strain distributions in the key positions of the vacuum tank,which can contribute to the safe performance assessment,operation efficiency,and fault analysis.Hence,this paper provides the distribution characteristics and variation rules of stress and tank strain of vacuum under different internal and external pressures through the elastic theoretical analysis and iteration method.The quasi-distributed fiber Bragg grating(FBG)sensors and the layout on the vacuum pressure vessel have thus been designed to monitor the whole vacuum extraction and loss process under three different loading conditions.Data analysis based on the theoretical results and monitoring information has further been conducted to validate the effectiveness of the proposed monitoring method for possible leakage defects.Research results indicate that the continuously monitoring data can quite sensitively and accurately characterize the microstrain variation features of the vacuum tank at different vacuum stages,and the loading-induced vibration effect should be carefully considered during the data interpretation.The study can provide scientific support for the vacuum loss state monitoring and safe performance assessment of the vacuum pressure vessels.展开更多
基金Supported by the National High Technology R&D Program (863-512, project, number 9805-10)the National Natural Science Foundation of China (grant. number 69674030).
文摘This article proposes a novel "cathode-on-membrane" vacuum microelectronic (VME)pressure sensor. Compared with conventional VME pressure sensors, the package process of the new structured sensor is easier to control, and therefore it enable greater potential of nass production and high productivity. The properties of the new sensor have been theoretically investigated by computer simulations; the practical structure has been designed and fabricated; and the package technique has been studied.
基金supported by the Provincial Scientific Projects of Gansu(22YF7GA182)Innovation Foundation of Provincial Education Department of Gansu(2024B-005)Fundamental Research Funds for the Central Universities(No.lzujbky-2024-05).
文摘Vacuum pressure vessels are one of the critical components in the aerospace field,and understanding the mechanical behavior feature is particularly important for safe operation.Therefore,it is meaningful to obtain the stress and strain distributions in the key positions of the vacuum tank,which can contribute to the safe performance assessment,operation efficiency,and fault analysis.Hence,this paper provides the distribution characteristics and variation rules of stress and tank strain of vacuum under different internal and external pressures through the elastic theoretical analysis and iteration method.The quasi-distributed fiber Bragg grating(FBG)sensors and the layout on the vacuum pressure vessel have thus been designed to monitor the whole vacuum extraction and loss process under three different loading conditions.Data analysis based on the theoretical results and monitoring information has further been conducted to validate the effectiveness of the proposed monitoring method for possible leakage defects.Research results indicate that the continuously monitoring data can quite sensitively and accurately characterize the microstrain variation features of the vacuum tank at different vacuum stages,and the loading-induced vibration effect should be carefully considered during the data interpretation.The study can provide scientific support for the vacuum loss state monitoring and safe performance assessment of the vacuum pressure vessels.
