We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the c...We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the chemical reaction of the femtosecond laser-induced structure change zone and hydrofluoric acid solution. The morphologies of the through micro-holes and micro-hole arrays are characterized by using scanning electronic microscopy, The effects of the pulse number on the depth and diameter of the holes are investigated. Honeycomb arrays of through micro-holes fabricated at different laser powers and pulse numbers are demonstrated.展开更多
A novel micro-hole electrode was fabricated to investigate the electron transfer reaction at the interface between two immiscible electrolyte solutions (ITIES). The electron transfer reaction between ferro/ferricyani...A novel micro-hole electrode was fabricated to investigate the electron transfer reaction at the interface between two immiscible electrolyte solutions (ITIES). The electron transfer reaction between ferro/ferricyanide in aqueous phase (W) and ferrocene in 1, 2-dichloroethane (O) phase was studied as a test experiment. The results showed that the diffusion coefficient obtained from the micro-hole electrode was consistent with that obtained at macro-interface. Due to its simplicity and the very small IR drop it will be a useful tool for the study of ITIES systems.展开更多
The quality of printed circuit board(PCB)micro-hole processing directly determines the stability of the inner and outer circuit connections.Micro-hole drilling technology is a typical method for PCB micro-hole process...The quality of printed circuit board(PCB)micro-hole processing directly determines the stability of the inner and outer circuit connections.Micro-hole drilling technology is a typical method for PCB micro-hole processing.The problem of optimal control of its drilling force is one of the main factors affecting the quality of micro-hole machining.To address this problem,the thrust forces and torques in PCB drilling were first modeled and analyzed,and the corresponding prediction models were established.The drilling force analysis was carried out through the micro-hole drilling experiment,the specific cutting energy under different feed rates was calculated,the influence of the size effect was clarified,and the accuracy of the prediction model was verified.The result shows that during the drilling of glass fiber cloth,changes in the material removal mechanism are induced as the feed per revolution is varied.When the feed per revolution is less than the tool edge radius,the glass fiber is not cut by the main cutting edge,but is crushed and broken.When the feed per revolution is greater than the radius of the tool edge,the glass fiber is cut by the main cutting edge.At the same time,the established analytical model can accurately reflect the influence of the size effect on the drilling torque in PCB micro-hole drilling,and the error is within 10%.This method has certain practical application value in controlling PCB micro hole processing quality.展开更多
WC-Co is used widely in die and mold industries due to its unique combination of hardness, strength and wear-resistance. For machining difficult-to-cut materials, such as tungsten carbide, micro-electrical discharge m...WC-Co is used widely in die and mold industries due to its unique combination of hardness, strength and wear-resistance. For machining difficult-to-cut materials, such as tungsten carbide, micro-electrical discharge machining(EDM) is one of the most effective methods for making holes because the hardness is not a dominant parameter in EDM. This paper describes the characteristics of the discharge conditions for micro-hole EDM of tungsten carbide with a WC grain size of 0.5 μm and Co content of 12%. The EDM process was conducted by varying the condenser and resistance values. A R-C discharge EDM device using arc erosion for micro-hole machining was suggested. Furthermore, the characteristics of the developed micro-EDM were analyzed in terms of the electro-optical observation using an oscilloscope and field emission scanning electron microscope.展开更多
The surface integrity of metal micro-hole structures produced by electrochemical discharge machining is unsatisfactory owing to the insufficient reaction area and strength of electrolysis action.A novel ultrahigh-spee...The surface integrity of metal micro-hole structures produced by electrochemical discharge machining is unsatisfactory owing to the insufficient reaction area and strength of electrolysis action.A novel ultrahigh-speed Rotary Electrochemical Discharge Machining(R-ECDM)using non-water-based electrolyte is proposed to improve surface integrity by changing the breakdown medium of spark discharge and increasing the reaction area and strength of electrolysis.A mathematical model was developed to establish the relationship between rotational speed and forces acting on the bubble.Based on the magnitude of forces,controlling rotational speed changed the behavior and departure radius of bubbles on the cathode surface.High-speed photographs validate that,in the mathematical model,the number and departure radius of bubbles on the cathode surface gradually decrease with the increase of rotational speed.The experimental results show that the roughness(Ra)of the micro-hole sidewall decreases from 2.54μm to 0.20μm when the rotational speed increases from 500 r/min to 40000 r/min.The length loss and wear ratio of the cathode are only 9.75μm and 6.5%,respectively.Finally,the micro-holes array with recast-free and surface roughness of 0.20μm is fabricated,demonstrating that the proposed approach contributes to improving surface integrity of metal micro-holes.展开更多
As Ti-6 Al-4 V is a typical hard to machine material,especially in micro drilling aviation parts,chip breaking difficulty is of increasing interest to explore its further development.In this study,Longitudinal-Torsion...As Ti-6 Al-4 V is a typical hard to machine material,especially in micro drilling aviation parts,chip breaking difficulty is of increasing interest to explore its further development.In this study,Longitudinal-Torsional Ultrasonic Assisted Drilling(LTUAD)was employed to machine Ti-6 Al-4 V,and its feasibility was evaluated by comparing with Conventional Drilling(CD).By combining periodical characteristics and vibration models(the separated or the unseparated ultrasonic elliptical vibration),the influence of ultrasonic frequency on the intersection characteristics of trajectories were analyzed.And the intersection characteristics were divided into four categories:even periodicity,odd periodicity,non-odd and even periodicity and composite periodicity,indicating different capability for chip breaking.By applying the longitudinal-torsional compound vibration horn,the micro-hole drilling experiment was carried out on machining center.The chip morphology,the thrust force,and the burr height were discussed.Experimental results showed that the morphology of chips presented as smaller and more fragmentary ones in LTUAD compared with continuous helical conical ones and fold-shaped ones in CD.Compared with CD,the average values of the thrust force in LTUAD reduced by 1.98%to 24.9%.According to the burr around the hole exit in both LTUAD and CD,the height of the latter was greatly affected by the drilling parameters.And the burr around the exit of the hole were distributed rather evenly with smaller extension in LTUAD.Consequently,the LTUAD employed in micro-hole drilling was effective.展开更多
基金Supported by the National Basic Research Program of China under Grant No 2012CB921804the National Natural Science Foundation of China under Grant Nos 11204236 and 61308006the Collaborative Innovation Center of Suzhou Nano Science and Technology
文摘We demonstrate a method of fabricating through micro-holes and micro-hole arrays in silicon using femtosecond laser irradiation and selective chemical etching. The micro-hole formation mechanism is identified as the chemical reaction of the femtosecond laser-induced structure change zone and hydrofluoric acid solution. The morphologies of the through micro-holes and micro-hole arrays are characterized by using scanning electronic microscopy, The effects of the pulse number on the depth and diameter of the holes are investigated. Honeycomb arrays of through micro-holes fabricated at different laser powers and pulse numbers are demonstrated.
文摘A novel micro-hole electrode was fabricated to investigate the electron transfer reaction at the interface between two immiscible electrolyte solutions (ITIES). The electron transfer reaction between ferro/ferricyanide in aqueous phase (W) and ferrocene in 1, 2-dichloroethane (O) phase was studied as a test experiment. The results showed that the diffusion coefficient obtained from the micro-hole electrode was consistent with that obtained at macro-interface. Due to its simplicity and the very small IR drop it will be a useful tool for the study of ITIES systems.
基金National Natural Science Foundation of China(No.51805079)Fundamental Research Funds for the Central Universities,China(No.2232021D-15)Shanghai Science and Technology Program(No.20DZ2251400)。
文摘The quality of printed circuit board(PCB)micro-hole processing directly determines the stability of the inner and outer circuit connections.Micro-hole drilling technology is a typical method for PCB micro-hole processing.The problem of optimal control of its drilling force is one of the main factors affecting the quality of micro-hole machining.To address this problem,the thrust forces and torques in PCB drilling were first modeled and analyzed,and the corresponding prediction models were established.The drilling force analysis was carried out through the micro-hole drilling experiment,the specific cutting energy under different feed rates was calculated,the influence of the size effect was clarified,and the accuracy of the prediction model was verified.The result shows that during the drilling of glass fiber cloth,changes in the material removal mechanism are induced as the feed per revolution is varied.When the feed per revolution is less than the tool edge radius,the glass fiber is not cut by the main cutting edge,but is crushed and broken.When the feed per revolution is greater than the radius of the tool edge,the glass fiber is cut by the main cutting edge.At the same time,the established analytical model can accurately reflect the influence of the size effect on the drilling torque in PCB micro-hole drilling,and the error is within 10%.This method has certain practical application value in controlling PCB micro hole processing quality.
基金supported by a Grant-in-aid for the National Core Research Center Program from MOST and KOSEF, Korea (No.R15-2006-022-01001-0)partly supported by Pusan National University Research Grand,2008
文摘WC-Co is used widely in die and mold industries due to its unique combination of hardness, strength and wear-resistance. For machining difficult-to-cut materials, such as tungsten carbide, micro-electrical discharge machining(EDM) is one of the most effective methods for making holes because the hardness is not a dominant parameter in EDM. This paper describes the characteristics of the discharge conditions for micro-hole EDM of tungsten carbide with a WC grain size of 0.5 μm and Co content of 12%. The EDM process was conducted by varying the condenser and resistance values. A R-C discharge EDM device using arc erosion for micro-hole machining was suggested. Furthermore, the characteristics of the developed micro-EDM were analyzed in terms of the electro-optical observation using an oscilloscope and field emission scanning electron microscope.
基金The authors acknowledged the financial support provided by the National Natural Science Foundation of China(No.91960204)the Natural Science Foundation of Jiangsu Province,China(No.BK20222010)+3 种基金the National Natural Science Foundation of China for Creative Research Groups(No.51921003)the Project of Science Center for Gas Turbine Project,China(No.HT-P2022-B-IV-010-001)the Fundamental Research Funds for the Central Universities,China(No.NP2022422)the Experimental Technology Research and Development Project in Nanjing University of Aeronautics and Astronautics,China(No.SYJS202203Z).
文摘The surface integrity of metal micro-hole structures produced by electrochemical discharge machining is unsatisfactory owing to the insufficient reaction area and strength of electrolysis action.A novel ultrahigh-speed Rotary Electrochemical Discharge Machining(R-ECDM)using non-water-based electrolyte is proposed to improve surface integrity by changing the breakdown medium of spark discharge and increasing the reaction area and strength of electrolysis.A mathematical model was developed to establish the relationship between rotational speed and forces acting on the bubble.Based on the magnitude of forces,controlling rotational speed changed the behavior and departure radius of bubbles on the cathode surface.High-speed photographs validate that,in the mathematical model,the number and departure radius of bubbles on the cathode surface gradually decrease with the increase of rotational speed.The experimental results show that the roughness(Ra)of the micro-hole sidewall decreases from 2.54μm to 0.20μm when the rotational speed increases from 500 r/min to 40000 r/min.The length loss and wear ratio of the cathode are only 9.75μm and 6.5%,respectively.Finally,the micro-holes array with recast-free and surface roughness of 0.20μm is fabricated,demonstrating that the proposed approach contributes to improving surface integrity of metal micro-holes.
基金supported by the National Natural Science Foundation of China(No.51875179)。
文摘As Ti-6 Al-4 V is a typical hard to machine material,especially in micro drilling aviation parts,chip breaking difficulty is of increasing interest to explore its further development.In this study,Longitudinal-Torsional Ultrasonic Assisted Drilling(LTUAD)was employed to machine Ti-6 Al-4 V,and its feasibility was evaluated by comparing with Conventional Drilling(CD).By combining periodical characteristics and vibration models(the separated or the unseparated ultrasonic elliptical vibration),the influence of ultrasonic frequency on the intersection characteristics of trajectories were analyzed.And the intersection characteristics were divided into four categories:even periodicity,odd periodicity,non-odd and even periodicity and composite periodicity,indicating different capability for chip breaking.By applying the longitudinal-torsional compound vibration horn,the micro-hole drilling experiment was carried out on machining center.The chip morphology,the thrust force,and the burr height were discussed.Experimental results showed that the morphology of chips presented as smaller and more fragmentary ones in LTUAD compared with continuous helical conical ones and fold-shaped ones in CD.Compared with CD,the average values of the thrust force in LTUAD reduced by 1.98%to 24.9%.According to the burr around the hole exit in both LTUAD and CD,the height of the latter was greatly affected by the drilling parameters.And the burr around the exit of the hole were distributed rather evenly with smaller extension in LTUAD.Consequently,the LTUAD employed in micro-hole drilling was effective.
