To calibrate the phase retardance of a Liquid crystal variable retarder(LCVR),its birefringence dispersion characteristic was analyzed,and the Support vector machines(SVM) algorithm was adopted to establish the predic...To calibrate the phase retardance of a Liquid crystal variable retarder(LCVR),its birefringence dispersion characteristic was analyzed,and the Support vector machines(SVM) algorithm was adopted to establish the prediction model.The obtained SVM decision function was used as a part of LCVR phase retardance,which was generated by the driving voltage.The experimental verification was carried out with a 568 nm laser.The results show that the deviation of the experimental value and the theoretical value is about 0.0061λ.SVM method could be used as an effective method for LCVR phase retardance characteristic calibration.展开更多
Atomic thickness thin films are critical functional materials and structures in atomic and close-to-atomic scale manufacturing.However,fast,facile,and highly sensitive precision measurement of atomic film thickness re...Atomic thickness thin films are critical functional materials and structures in atomic and close-to-atomic scale manufacturing.However,fast,facile,and highly sensitive precision measurement of atomic film thickness remains challenging.The reflected light has a dramatic phase change and extreme reflectivity considering the Brewster angle,indicating the high sensitivity of the optical signal to film thickness near this angle.Hence,the precision polarization measurement method focusing on Brewster angle is vital for the ultrahigh precision characterization of thin films.A precision polarization measurement method based on a liquid crystal variable retarder(LCVR)is proposed in this paper,and a measurement system with a high angular resolution is established.A comprehensive measurement system calibration scheme is also introduced to accommodate ultrahigh precision film thickness measurement.Repeatable measurement accuracy to the subnanometer level is achieved.Standard silicon oxide film samples of different thicknesses were measured around Brewster angle using the self-developed system and compared with a commercial ellipsometer to verify the measurement accuracy.The consistency of the thickness measurement results demonstrates the feasibility and robustness of the measurement method and calibration scheme.This study also demonstrates the remarkable potential of the LCVR-based polarization method for atomic film thickness measurement in ultraprecision manufacturing.展开更多
The Stokes polarimeter based on liquid crystal variable retarders(LCVRs)is envisaged as a promising novel technique for polarization measurement in space applications due to the inherent advantage of eliminating the n...The Stokes polarimeter based on liquid crystal variable retarders(LCVRs)is envisaged as a promising novel technique for polarization measurement in space applications due to the inherent advantage of eliminating the need for conventional rotating polarizing optics and increasing the measuring speed.However,the intrinsic multi-beam interference in LCVRs limits its polarization accuracy by several percent.How to eliminate the influence of the interference effect becomes an urgent issue for the liquid-crystal-based Stokes polarimeter.The present study introduces a simplified but effective interference model based on the thin-film optics and polarized light theory to simulate the relationship between the interference effect of the LCVRs-based Stokes polarimeter and the polarization accuracy.The simulation results show that the transmittance variation of LCVR with the derived voltage is caused by multi beam interference between the indium tin oxide(ITO)film and the liquid crystal within LCVR,which produces a few percent of instrumental polarization.The instrumental polarization is about 0.01 and different for different wavelengths.An optimization method was proposed to reduce the instrumental polarization to 0.002,effectively improving the polarization sensitivity of the Stokes polarimeter limited by the interference.In addition,an experimental setup was built up to measure and analyze the influence of the interference effect of the LCVRs-based Stokes polarimeter on the polarization accuracy before and after the optimization.The experiment results are in good agreement with the simulation.展开更多
The Advanced Space-based Solar Observatory(ASO-S)is a mission proposed by the Chinese Solar Physics Community.As one of the three payloads of ASO-S,the Full-disc Magneto-Graph(FMG)will measure the photospheric magneti...The Advanced Space-based Solar Observatory(ASO-S)is a mission proposed by the Chinese Solar Physics Community.As one of the three payloads of ASO-S,the Full-disc Magneto-Graph(FMG)will measure the photospheric magnetic fields of the entire solar disk with high spatial and temporal resolution,and high magnetic sensitivity,where liquid crystal variable retarder(LCVR)is the key to whether FMG can achieve its scientific goal.So far,there is no space flight experience for LCVR.Therefore,irradiation study for LCVRs becomes more important and urgent in order to make sure their safety and reliability in space application.In this paper,γirradiation,proton irradiation,and ultra-violet(UV)irradiation are tested for LCVRs respectively.The optical and chemical properties during irradiation tests are measured and analyzed.For optical properties,there is no significant change in those parameters FMG payload concerned except the retardation.Although there is no drastic degradation in the retardation versus voltage during irradiations,the amount of retardation variation is much higher than the instrument requirements.Thus,an in-flight retardation versus voltage should be added in FMG payload,reducing or even avoiding the impact of retardation change.For chemical properties,the clearing point and birefringence of the LC materials almost have no change;the ion density dose not change below 60 krad[Si],but begin to increase dramatically above 60 krad[Si].展开更多
基金supported by the National Natural Science Foundation of China ( grant no. 91338116)the National Key Basic Research and Development Program ( 973 Plan) ( grant no. 613225)
文摘To calibrate the phase retardance of a Liquid crystal variable retarder(LCVR),its birefringence dispersion characteristic was analyzed,and the Support vector machines(SVM) algorithm was adopted to establish the prediction model.The obtained SVM decision function was used as a part of LCVR phase retardance,which was generated by the driving voltage.The experimental verification was carried out with a 568 nm laser.The results show that the deviation of the experimental value and the theoretical value is about 0.0061λ.SVM method could be used as an effective method for LCVR phase retardance characteristic calibration.
基金supported by National Key Research&Development Program of China(Grant No.2019YFB2005601)the General Program of NSFC(52075383)Major Scientific Research Instrument Development Project of NSFC(61927808).
文摘Atomic thickness thin films are critical functional materials and structures in atomic and close-to-atomic scale manufacturing.However,fast,facile,and highly sensitive precision measurement of atomic film thickness remains challenging.The reflected light has a dramatic phase change and extreme reflectivity considering the Brewster angle,indicating the high sensitivity of the optical signal to film thickness near this angle.Hence,the precision polarization measurement method focusing on Brewster angle is vital for the ultrahigh precision characterization of thin films.A precision polarization measurement method based on a liquid crystal variable retarder(LCVR)is proposed in this paper,and a measurement system with a high angular resolution is established.A comprehensive measurement system calibration scheme is also introduced to accommodate ultrahigh precision film thickness measurement.Repeatable measurement accuracy to the subnanometer level is achieved.Standard silicon oxide film samples of different thicknesses were measured around Brewster angle using the self-developed system and compared with a commercial ellipsometer to verify the measurement accuracy.The consistency of the thickness measurement results demonstrates the feasibility and robustness of the measurement method and calibration scheme.This study also demonstrates the remarkable potential of the LCVR-based polarization method for atomic film thickness measurement in ultraprecision manufacturing.
基金National Natural Science Foundation for Special of China(61127015)International Science and Technology Cooperative Project(2013DFR10150)Science and Technology Research Fund for Youth of Shanxi(2014021012)
基金Project supported by the Strategic Pioneer Program on Space Science,Chinese Academy of Sciences(Grant Nos.XDA15010800 and XDA15320102)the National Natural Science Foundation of China(Grant Nos.11427901,11773040,11403047,and 11427803)。
文摘The Stokes polarimeter based on liquid crystal variable retarders(LCVRs)is envisaged as a promising novel technique for polarization measurement in space applications due to the inherent advantage of eliminating the need for conventional rotating polarizing optics and increasing the measuring speed.However,the intrinsic multi-beam interference in LCVRs limits its polarization accuracy by several percent.How to eliminate the influence of the interference effect becomes an urgent issue for the liquid-crystal-based Stokes polarimeter.The present study introduces a simplified but effective interference model based on the thin-film optics and polarized light theory to simulate the relationship between the interference effect of the LCVRs-based Stokes polarimeter and the polarization accuracy.The simulation results show that the transmittance variation of LCVR with the derived voltage is caused by multi beam interference between the indium tin oxide(ITO)film and the liquid crystal within LCVR,which produces a few percent of instrumental polarization.The instrumental polarization is about 0.01 and different for different wavelengths.An optimization method was proposed to reduce the instrumental polarization to 0.002,effectively improving the polarization sensitivity of the Stokes polarimeter limited by the interference.In addition,an experimental setup was built up to measure and analyze the influence of the interference effect of the LCVRs-based Stokes polarimeter on the polarization accuracy before and after the optimization.The experiment results are in good agreement with the simulation.
基金Project supported by the Strategic Pioneer Program on Space Science,Chinese Academy of Sciences(Grant Nos.XDA15010800 and XDA15320102)the National Natural Science Foundation of China(Grant Nos.11427901,11773040,11403047,and 11427803).
文摘The Advanced Space-based Solar Observatory(ASO-S)is a mission proposed by the Chinese Solar Physics Community.As one of the three payloads of ASO-S,the Full-disc Magneto-Graph(FMG)will measure the photospheric magnetic fields of the entire solar disk with high spatial and temporal resolution,and high magnetic sensitivity,where liquid crystal variable retarder(LCVR)is the key to whether FMG can achieve its scientific goal.So far,there is no space flight experience for LCVR.Therefore,irradiation study for LCVRs becomes more important and urgent in order to make sure their safety and reliability in space application.In this paper,γirradiation,proton irradiation,and ultra-violet(UV)irradiation are tested for LCVRs respectively.The optical and chemical properties during irradiation tests are measured and analyzed.For optical properties,there is no significant change in those parameters FMG payload concerned except the retardation.Although there is no drastic degradation in the retardation versus voltage during irradiations,the amount of retardation variation is much higher than the instrument requirements.Thus,an in-flight retardation versus voltage should be added in FMG payload,reducing or even avoiding the impact of retardation change.For chemical properties,the clearing point and birefringence of the LC materials almost have no change;the ion density dose not change below 60 krad[Si],but begin to increase dramatically above 60 krad[Si].
