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The Influence of Different Type Irradiations on the Surface States Parameters of Si-SiO<sub>2</sub>Structures
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作者 Aram A. Sahakyan Hrant N. Yeritsyan +2 位作者 Vachagan V. Harutunyan Hamlet S. Karayan Vahan A. Sahakyan 《Journal of Modern Physics》 2015年第11期1657-1662,共6页
The results of experimental research of some effects in metal-insulator-semiconductor (MIS) structures induced by different types of radiation (50 MeV electrons, 12 keV gamma-quanta, 10 and 40 keV arsenic ions) are pr... The results of experimental research of some effects in metal-insulator-semiconductor (MIS) structures induced by different types of radiation (50 MeV electrons, 12 keV gamma-quanta, 10 and 40 keV arsenic ions) are presented. It is found that there is a significant difference between the characters of radiation surface states (SS) formed by ionization and impact actions of the MIS structure irradiation at the insulator-semiconductor (I-S) interface. It is shown that the SS generation rate is increased in electric fields and depends on the MIS structure field electrode material. 展开更多
关键词 METAL-insulator-semiconductor (MIS) STRUCTURES Radiation Effects Surface STATES (SS) Density insulator-semiconductor (i-s) interface Annealing
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