TN305 2003053940亚微米尺寸元件的离子束刻蚀制作=Fabrication of submicronelements by ion beam etching[刊,中]/曹召良(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),陆广…//光子学报.—2003,32(6).—653-656采用...TN305 2003053940亚微米尺寸元件的离子束刻蚀制作=Fabrication of submicronelements by ion beam etching[刊,中]/曹召良(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),陆广…//光子学报.—2003,32(6).—653-656采用软光刻技术中的微接触印刷(μCP)技术,表面诱导的水蒸气冷凝,表面诱导的去湿行为,在金基底上制作出了亚微米的环状周期结构聚合物掩膜。通过对离子束刻蚀过程中各个参量对刻蚀元件的表面光洁度。展开更多
The plasma polymerization method and dynamic ion-beam mixed implantation method were employed to coat ultra-thin polymer films on copper plates. Experiments indicated that steady dropwise condensation of steam at atmo...The plasma polymerization method and dynamic ion-beam mixed implantation method were employed to coat ultra-thin polymer films on copper plates. Experiments indicated that steady dropwise condensation of steam at atmospheric pressure occurred. The condensation heat transfer coefficients increased by approximately 3 and 5－7 times for the polytrimethylvinylsilane film and polytetrafluoroethylene film respectively, compared with the value for film condensation under the same experimental conditions. The temperatures on the condensing surface and inside the test block were found to be rapidly and randomly fluctuated. The properties of the coated films and advantages of the methods used in this investigation were discussed briefly.展开更多
文摘TN305 2003053940亚微米尺寸元件的离子束刻蚀制作=Fabrication of submicronelements by ion beam etching[刊,中]/曹召良(中科院长春光机所应用光学国家重点实验室.吉林,长春(130022)),陆广…//光子学报.—2003,32(6).—653-656采用软光刻技术中的微接触印刷(μCP)技术,表面诱导的水蒸气冷凝,表面诱导的去湿行为,在金基底上制作出了亚微米的环状周期结构聚合物掩膜。通过对离子束刻蚀过程中各个参量对刻蚀元件的表面光洁度。
基金the National Natural Science Foundation of China (No. 59906002) and the Foundation for Young Teachers of Dalian University of Technology.
文摘The plasma polymerization method and dynamic ion-beam mixed implantation method were employed to coat ultra-thin polymer films on copper plates. Experiments indicated that steady dropwise condensation of steam at atmospheric pressure occurred. The condensation heat transfer coefficients increased by approximately 3 and 5－7 times for the polytrimethylvinylsilane film and polytetrafluoroethylene film respectively, compared with the value for film condensation under the same experimental conditions. The temperatures on the condensing surface and inside the test block were found to be rapidly and randomly fluctuated. The properties of the coated films and advantages of the methods used in this investigation were discussed briefly.
