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残余应力研究概况 被引量:9
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作者 何家文 徐可为 李家宝 《国际学术动态》 1998年第2期75-76,共2页
第5届国际残余应力学术会议(The Fifth International Conference on Residual Stresses)于1997年6月16日至18日在瑞典的林雪平召开,与会代表有253人,来自29个国家和地区。会上交流论文271篇。会上确定,第7届国际残余应力学术会议(ICRS... 第5届国际残余应力学术会议(The Fifth International Conference on Residual Stresses)于1997年6月16日至18日在瑞典的林雪平召开,与会代表有253人,来自29个国家和地区。会上交流论文271篇。会上确定,第7届国际残余应力学术会议(ICRS-7)于2004年在我国西安召开。第6届已在上次会议上确定于2000年在英国牛津召开。残余应力对材料制备、元器件和零部件的制作与使用都有很大的影响。但是,直到目前为止,在残余应力的产生、测量、控制和调整以及它对各种性能的影响等方面仍有许许多多的问题没有解决。而且,随着新型材料、先进工艺和精细元器件的不断涌现,残余应力问题变得越来越突出,因此,各工业发达国家都投入大量的人力和物力,以期在学科和工程两方面都取得较大的进展。 展开更多
关键词 金属 ICRS5 残余应力学 学术会议 研究
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螺旋焊接管的焊缝残余应力特征分析
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作者 月兰 田汝珉 《石油工程建设》 北大核心 1994年第6期49-51,共3页
本文提供了由小孔法和切割法对东北输油管道工程所用直径720mm螺旋焊管焊缝残余应力进行测试所得结果,分析了残余应力沿焊缝纵向及横向的分布特征,并对沿壁厚方向的残余应力变化进行了初探。
关键词 螺旋焊接管 焊缝 残余应 焊接 油管
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TiAlN涂层表面残余应力主应力状态实验研究 被引量:2
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作者 朱宝春 王俊伟 +1 位作者 裴绍虎 朱亮 《热加工工艺》 CSCD 北大核心 2014年第8期150-152,共3页
利用X射线衍射法对TiAlN涂层的残余应力主应力状态进行了实验研究,并通过二向应力状态分析法,求得了TiAlN涂层的残余应力主应力和方向角,并且其与实验测量结果偏差为4%~14%,验证了二向应力解析法在残余应力检测方面的可靠性。实... 利用X射线衍射法对TiAlN涂层的残余应力主应力状态进行了实验研究,并通过二向应力状态分析法,求得了TiAlN涂层的残余应力主应力和方向角,并且其与实验测量结果偏差为4%~14%,验证了二向应力解析法在残余应力检测方面的可靠性。实验结果表明,随TiAlN涂层厚度的增大,涂层的残余应力主应力不断减小,有效地阻止了涂层与基体的剥离,具有重要的现实意义。 展开更多
关键词 X射线衍射法 TIALN涂层 残余应力主
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焊接残余应力的模拟和控制消除的相关问题研究 被引量:2
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作者 高立峰 李志国 +1 位作者 罗梦佳 陈民昌 《内燃机与配件》 2019年第6期117-118,共2页
焊接是一种非常常用的材料连接工艺,由于其具有非常优良的连接性能,被广泛应用于多个领域之中。但是在实际的焊接过程中,其焊接质量会受到多种因素的影响,一旦处理不善,就可能导致残余应力的产生,进而影响到焊接质量和焊接结构的使用寿... 焊接是一种非常常用的材料连接工艺,由于其具有非常优良的连接性能,被广泛应用于多个领域之中。但是在实际的焊接过程中,其焊接质量会受到多种因素的影响,一旦处理不善,就可能导致残余应力的产生,进而影响到焊接质量和焊接结构的使用寿命。因此,为了确保焊接质量符合国家相关标准规范的要求,就需要通过对残余应力进行系统全面的分析研究,在此基础上,采取有针对性的控制消除措施,进而为焊接质量提供可靠保障。本文通过对焊接残余应力进行深入的模拟分析,在此基础上,提出了具有针对性的焊接残余应力控制消除措施,对于残余应力的控制消除具有一定的积极意义,对于从事相关工作的技术人员具有一定的借鉴意义。 展开更多
关键词 焊接 残余应 控制 消除
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应力应变、疲劳与脆断、断裂力学
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《机械制造文摘(焊接分册)》 2008年第5期13-17,共5页
关键词 焊接残余应 焊缝纵向 断裂力学 无变形焊接技术
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Effect of quenching cooling rate on residual stress and microstructure evolution of 6061 aluminum alloy
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作者 HUANG Ke YI You-ping +4 位作者 HUANG Shi-quan HE Hai-lin LIU Jie HUA Hong-en TANG Yun-jian 《Journal of Central South University》 SCIE EI CAS CSCD 2024年第7期2167-2180,共14页
In this study,the cooling rate was manipulated by quenching with water of different temperatures(30,60 and 100℃).Surface and internal residual stresses in the quenched 6061 aluminum alloy samples were measured using ... In this study,the cooling rate was manipulated by quenching with water of different temperatures(30,60 and 100℃).Surface and internal residual stresses in the quenched 6061 aluminum alloy samples were measured using hole-drilling and crack compliance methods,respectively.Then,the processability of the quenched samples was evaluated at cryogenic temperatures.The mechanical properties of the as-aged samples were assessed,and microstructure evolution was analyzed.The surface residual stresses of samples W30℃,W60℃and W100℃is−178.7,−161.7 and−117.2 MPa,respectively along x-direction,respectively;and−191.2,−172.1 and−126.2 MPa,respectively along y-direction.The sample quenched in boiling water displaying the lowest residual stress(~34%and~60%reduction in the surface and core).The generation and distribution of quenching residual stress could be attributed to the lattice distortion gradient.Desirable plasticity was also exhibited in the samples with relatively low quenching cooling rates at cryogenic temperatures.The strengthes of the as-aged samples are 291.2 to 270.1 MPa as the quenching water temperature increase from 30℃to 100℃.Fine and homogeneous β"phases were observed in the as-aged sample quenched with boiling water due to the clusters and Guinier-Preston zones(GP zones)premature precipitated during quenching process. 展开更多
关键词 6061 aluminum alloy residual stress cooling rate cryogenic cooling mechanical properties microstructure evolution
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Residual stress and mechanical properties analysis of TC4 alloy fabricated by laser additive manufacturing
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作者 ZHAO Hong-jian LIU Chen +4 位作者 HU Jie-xin YIN Shuai YANG Chao-wei LIU Chang-sheng ZHAN Yu 《Journal of Central South University》 CSCD 2024年第11期3983-3995,共13页
Large residual stresses would be generated in the laser additive manufactured(LAMed)structures after processing rapid and intense heating and cooling cycles with bad mechanical properties.Scholars have tried many meth... Large residual stresses would be generated in the laser additive manufactured(LAMed)structures after processing rapid and intense heating and cooling cycles with bad mechanical properties.Scholars have tried many methods to decrease the residual stress to prevent the structures from being broken and improve the mechanical properties.In this study,residual stress and mechanical properties of LAMed structures are analyzed,and the advanced measuring method,laser ultrasonic technique,is used to detect the residual stresses accumulated in the samples in time.The results show that when the solution temperature is less than T_(β)(992℃),the residual stress increases gradually with the increase of solution temperature,and when the temperature is more than T_(β)(992℃),Widmanstätten structure will significantly reduce the residual stress;the mechanical properties of the specimen decrease with the increase of the solution temperature,and the different cooling methods do not have much effect on the elastic properties of the specimen.Considering the residual stress and mechanical properties,the HT1 system used in this paper is the best.This study is of great significance for the reasonable suppression of residual stress and the regulation of mechanical properties of TC4 titanium alloy fabricated by laser additive manufacturing. 展开更多
关键词 laser additive manufacturing heat treatment residual stress mechanical properties
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退火温度对铸态Ti_(49)Ni_(51)形状记忆合金微观组织和力学性能的影响 被引量:4
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作者 李培友 《有色金属工程》 CAS CSCD 北大核心 2016年第6期20-23,共4页
采用光学显微镜、X射线衍射仪(XRD)和万能试验机等仪器对铸态以及退火条件下Ti_(49)Ni_(51)形状记忆合金的微观组织和力学性能进行了研究。结果表明,合金随着退火温度的升高,晶粒逐渐由纤维状向等轴状过渡,晶粒变得粗大。XRD分析发现,... 采用光学显微镜、X射线衍射仪(XRD)和万能试验机等仪器对铸态以及退火条件下Ti_(49)Ni_(51)形状记忆合金的微观组织和力学性能进行了研究。结果表明,合金随着退火温度的升高,晶粒逐渐由纤维状向等轴状过渡,晶粒变得粗大。XRD分析发现,对于铸态合金,在非晶态弥散衍射峰基础上呈现出Ti Ni晶体相衍射峰;样品在723 K和773 K退火,非晶态弥散衍射峰消失,XRD谱图上显示出现Ti Ni晶体相的衍射峰。Ti_(49)Ni_(51)合金在723 K和773 K温度下热处理30 min后进行压缩试验的结果表明,723 K热处理试样在加载过程中母相奥氏体朝马氏体起始转变应力σAs大于773 K热处理试样的母相奥氏体朝马氏体起始转变应力;然而,前者母相奥氏体朝马氏体完成转变应力σAf小于后者母相奥氏体朝马氏体完成转变应力;另外,在卸载试验中,前者的残余应变小于后者的残余应变。 展开更多
关键词 Ti49Ni51形状记忆合金 微观组织 力学性能 残余应变量
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Effect of welding sequence on residual stress in thin-walled octagonal pipe-plate structure 被引量:12
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作者 傅定发 周长青 +2 位作者 李灿 王冠 李落星 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第3期657-664,共8页
A three-dimensional finite element approach based on ABAQUS code was developed to investigate the effect of welding sequence on welding residual stress distribution in a thin-walled 6061 aluminum alloy structure. To o... A three-dimensional finite element approach based on ABAQUS code was developed to investigate the effect of welding sequence on welding residual stress distribution in a thin-walled 6061 aluminum alloy structure. To obtain sound numerical results, the therrno-mechanical behaviour was simulated using a direct-coupled formulation. Nine different simulation sequences were carried out by single-pass TIG welding of an octagonal pipe-plate joint, and the distributions of longitudinal and transverse residual stresses both on the outer and inner surfaces of the pipe were analyzed. The results suggest that the final residual stresses in the weld and its vicinity are not affected by the initial residual stresses of the structure. Selecting a suitable welding sequence can reduce the final residual stress in an octagonal pipe-plate joint. 展开更多
关键词 residual stress welding sequence pipe-plate joint single-pass welding initial residual stress
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Evaluation on residual stresses of silicon-doped CVD diamond films using X-ray diffraction and Raman spectroscopy 被引量:12
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作者 陈苏琳 沈彬 +2 位作者 张建国 王亮 孙方宏 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第12期3021-3026,共6页
The effect of silicon doping on the residual stress of CVD diamond films is examined using both X-ray diffraction (XRD) analysis and Raman spectroscopy measurements. The examined Si-doped diamond films are deposited o... The effect of silicon doping on the residual stress of CVD diamond films is examined using both X-ray diffraction (XRD) analysis and Raman spectroscopy measurements. The examined Si-doped diamond films are deposited on WC-Co substrates in a home-made bias-enhanced HFCVD apparatus. Ethyl silicate (Si(OC2H5)4) is dissolved in acetone to obtain various Si/C mole ratio ranging from 0.1% to 1.4% in the reaction gas. Characterizations with SEM and XRD indicate increasing silicon concentration may result in grain size decreasing and diamond [110] texture becoming dominant. The residual stress values of as-deposited Si-doped diamond films are evaluated by both sin2ψ method, which measures the (220) diamond Bragg diffraction peaks using XRD, with ψ-values ranging from 0° to 45°, and Raman spectroscopy, which detects the diamond Raman peak shift from the natural diamond line at 1332 cm-1. The residual stress evolution on the silicon doping level estimated from the above two methods presents rather good agreements, exhibiting that all deposited Si-doped diamond films present compressive stress and the sample with Si/C mole ratio of 0.1% possesses the largest residual stress of ~1.75 GPa (Raman) or ~2.3 GPa (XRD). As the silicon doping level is up further, the residual stress reduces to a relative stable value around 1.3 GPa. 展开更多
关键词 silicon-doped diamond films silicon doping residual stress X-ray diffraction Raman spectroscopy
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Effect of wet shot peening on Ti-6Al-4V alloy treated by ceramic beads 被引量:7
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作者 陈国清 焦岩 +3 位作者 田唐永 张新华 李志强 周文龙 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第3期690-696,共7页
Ti-6Al-4V alloy was processed by wet shot peening with ceramic beads. The effects of the shot peened intensity on the microstructure, surface morphology, and residual stress were investigated. A tensile-tensile fatigu... Ti-6Al-4V alloy was processed by wet shot peening with ceramic beads. The effects of the shot peened intensity on the microstructure, surface morphology, and residual stress were investigated. A tensile-tensile fatigue test was performed and the fracture mechanism was proposed. The results demonstrate that the surface roughness after wet shot peening is obviously lower than that after dry shot peening. With the increase of the shot peened intensity, the depth of the residual stress layer increases to 250 ktrn, and the maximum stress in this layer increases to -895 MPa. The fatigue strength also increases by 12.4% because of the wet shot peening treatment. The dislocation density of the surface layer is significantly enhanced after the wet shot peening with ceramic beads. The microstructure of the surface layer is obviously refined into ultra-fine grains. 展开更多
关键词 Ti-6Al-4V alloy wet shot peening microstructure residual stress fatigue property
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SURFACE CHARACTERISTICS OF 10Ni3MnCuAl STEEL BY SHOT PEENING 被引量:7
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作者 缪宏 左敦稳 +1 位作者 王红军 汪洪峰 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2009年第3期178-183,共6页
The surface of grinding 10Ni3MnCuAl steel is processed by the shot peening with different intensities. After shot peening, the metallographic structure of 10Ni3MnCuAl steel and the micro-structure on the surface layer... The surface of grinding 10Ni3MnCuAl steel is processed by the shot peening with different intensities. After shot peening, the metallographic structure of 10Ni3MnCuAl steel and the micro-structure on the surface layer are analyzed. The micro-hardness in the shot peening affected layer and the residual pressure stress are surveyed. The changes of surface quality, such as micro-hardness, metallographic structure and residual stress caused by shot peening are investigated. The result shows that shot peening can significantly improve surface quality and fatigue life of 10Ni3MnCuAl steel. The over peening effect is produced when the shot peening intensity is high, and it leads to the decrease of the fatigue life. When the optimal arc high value of shot peening is 0. 40 mm in experiments, the best surface quality is obtained and the depth of the residual stress in the precipitation-hardening layer reaches 450μm. 展开更多
关键词 shot peening surface properties residual stress over peening
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Time-temperature-property curves for quench sensitivity of 6063 aluminum alloy 被引量:6
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作者 李红英 曾翠婷 +2 位作者 韩茂盛 刘蛟蛟 鲁晓超 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2013年第1期38-45,共8页
The quench sensitivity of 6063 alloy was investigated via constructing time-temperature-property(TTP) curves by interrupted quenching technique and transmission electron microscopy(TEM) analysis.The results show t... The quench sensitivity of 6063 alloy was investigated via constructing time-temperature-property(TTP) curves by interrupted quenching technique and transmission electron microscopy(TEM) analysis.The results show that the quench sensitivity of 6063 alloy is lower than that of 6061 or 6082 alloy,and the critical temperature ranges from 300 to 410℃ with the nose temperature of about 360℃.From TEM analysis,heterogeneous precipitate β-Mg2Si is prior to nucleate on the(AlxFeySiz) dispersoids in the critical temperature range,and grows up most rapidly at the nose temperature of 360℃.The heterogeneous precipitation leads to a low concentration of solute,which consequently reduces the amount of the strengthening phase β'' after aging.In the large-scale industrial production of 6063 alloy,the cooling rate during quenching should be enhanced as high as possible in the quenching sensitive temperature range(410-300℃) to suppress the heterogeneous precipitation to get optimal mechanical properties,and it should be slowed down properly from the solution temperature to 410℃ and below 300℃ to reduce the residual stress. 展开更多
关键词 6063 aluminum alloy quench sensitivity HARDNESS time-temperature-property curve strengthening phase heterogeneous precipitation residual stress
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Internal residual stress measurement on linear friction welding of titanium alloy plates with contour method 被引量:11
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作者 刘川 董春林 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第5期1387-1392,共6页
The internal residual stress within a TC 17 titanium alloy joint welded by linear friction welding (LFW) was measured by the contour method, which is a relatively new and destructive technique to obtain a full map o... The internal residual stress within a TC 17 titanium alloy joint welded by linear friction welding (LFW) was measured by the contour method, which is a relatively new and destructive technique to obtain a full map of internal residual stress. The specimen was first cut into two parts; the out-of-plane displacement contour formed by the release of the residual stress was then measured; finally, taking the measured contour of the cut plane as the boundary conditions, a linear elastic finite element analysis was carried out to calculate the corresponding distribution of residual stress normal to the cut plane. The internal stress distribution of the TC 17 titanium alloy LFWjoint was also analyzed. The results show that the tensile residual stress in the TC17 LFW weld is mainly present within a region about 12 mm from the weld centerline; the peak tensile residual stress occurs at the weld centerline and reaches 360 MPa (about one third of the yield strength of TC17 alloy); within the weld zone of the TC17 LFW weld, the through-thickness stress is not uniform, and the internal stress is larger than that near the top or bottom surface. 展开更多
关键词 residual stress linear friction welding titanium alloy contour method
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Mechanical properties of strengthened surface layer in Ti-6Al-4V alloy induced by wet peening treatment 被引量:5
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作者 李康 付雪松 +2 位作者 陈国清 周文龙 李志强 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2016年第11期2868-2873,共6页
A modified surface layer was formed on Ti-6Al-4V alloy by wet peening treatment. The variations of the residual stress,nano-hardness and microstructure of the modified layer with depth from surface were studied using ... A modified surface layer was formed on Ti-6Al-4V alloy by wet peening treatment. The variations of the residual stress,nano-hardness and microstructure of the modified layer with depth from surface were studied using X-ray diffraction analysis,nano-indentation analysis, scanning electron microscopy and transmission electron microscopy observations. The results show thatboth the compressive residual stress and hardness decrease with increasing depth, and the termination depths are 160 and 80 μm,respectively. The microstructure observation indicates that within 80 μm, the compressive residual stress and the hardness areenhanced by the co-action of the grain refinement strengthening and dislocation strengthening. Within 80–160 μm, the compressiveresidual stress mainly derives from the dislocation strengthening. The strengthened layer in Ti-6Al-4V alloy after wet peeningtreatment was quantitatively analyzed by a revised equation with respect to a relation between hardness and yield strength. 展开更多
关键词 Ti-6Al-4V alloy wet peening nano-hardness compressive residual stress local yield strength
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Debonding phenomenon of TiO_2 nanotube film 被引量:1
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作者 邹俭鹏 WANG Ri-zhi 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2012年第11期2691-2699,共9页
Curvature method was used to measure the residual stress and substrate straining tensile test was carried out to study the debonding behavior of TiO2 nanotube film. The results indicate that the internal residual stre... Curvature method was used to measure the residual stress and substrate straining tensile test was carried out to study the debonding behavior of TiO2 nanotube film. The results indicate that the internal residual stress is -54 MPa. The strains of debonding initiation of TiO2 nanotube films without annealing, with 250 °C annealing and with 400 °C annealing are 2.6%, 5.1% and 8.6%, respectively, and the average radii of the debonding patches with debonding initiation are 27.5, 17.1 and 19.4 μm, respectively. The true critical debonding stresses of TiO2 nanotube films without annealing, with 250 °C annealing and with 400 °C annealing can be estimated as 220.4, 394.5 and 627.9 MPa, respectively. Interfacial shear lag model is modified and polynomial fitting equation of the interfacial shear strength of TiO2 nanotube film is demonstrated under debonding conditions. The modification and polynomial fitting are reliable since good agreement of the interfacial shear strengths after fitting is obtained compared with those results from the crack density analysis. 展开更多
关键词 TiO2 nanotube interfacial shear strength debonding behavior debonding density debonding radius internal residued stress
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Prediction of vulnerable zones based on residual stress and microstructure in CMT welded aluminum alloy joint
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作者 舒凤远 田泽 +5 位作者 吕耀辉 贺文雄 吕飞洋 林建军 赵洪运 徐滨士 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第8期2701-2707,共7页
Numerical simulation and experimental results were employed for the identification of the most vulnerable zones in three-pass cold-metal-transferring (CMT) welded joint. The residual stress distribution in the joint... Numerical simulation and experimental results were employed for the identification of the most vulnerable zones in three-pass cold-metal-transferring (CMT) welded joint. The residual stress distribution in the joint was predicted by finite element (FE) method, while the structural morphology of distinctive zones was obtained through metallographic experiments. The highest principal stress made the symmetric face of the joint most sensitive to tensile cracks under service conditions. Whereas, the boundaries between the weld seam and the base plates were sensitive to cracks because the equivalent von Mises stress was the highest when the first interpass cooling was finished. The third weld pass and the inter-pass remelted zones exhibited the modest mechanical performances as a result of the coarse grain and coarse grain boundary, respectively. The most vulnerable zones were regarded to be the crossed parts between the zones identified by numerical and experimental methods. 展开更多
关键词 aluminum alloy vulnerable zone cold-metal-transferring welded joint residual stress microstructure morphology
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RESEARCH ON COLD EXPANDED HOLE WITH FEM
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作者 傅仕伟 王珉 左敦稳 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 1998年第1期7-14,共8页
Because of the generated residual stress after applying cold expanded technique with split sleeve, fatigue life of joint hole in aircraft can be distinguishedly prolonged. To study residual stress around cold expan... Because of the generated residual stress after applying cold expanded technique with split sleeve, fatigue life of joint hole in aircraft can be distinguishedly prolonged. To study residual stress around cold expanded hole, some hypothesises such as small deformation in radial symmetry, plane stress, plane strain, uniform distribution pressure have been presented in most papers. However, accurate result cannot be gained based on these hypothesises. In order to overcome the shortage, a 3 dimensional model is proposed which takes into consideration of the effect on split sleeve and the different distribution pressure along thick direction of specimen. The stress distributions of cold expanded hole with split sleeve under loading or unloading, as well as under fatigue tension have been stu died. To reveal the advantage of cold expanding process with split sleeve, the expansion without split sleeve has also been studied and compared with the former. 展开更多
关键词 cold worked finite element residual stress PHOTOPLASTIC anti fatigue
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PIEZOSPECTROSCOPIC STUDY OF RESIDUAL STRESSES AROUND INDENTATIONS IN SiC/Al_O_3 NANOCOMPOSITE
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作者 陶杰 崔益华 杨斌鹏 《Transactions of Nanjing University of Aeronautics and Astronautics》 EI 2003年第1期85-90,共6页
A new experimental measurement of residual stresses around Vickers′ indentations on the surface of the SiC/Al 2O 3 nanocomposites is proposed with the aid of a Raman microprobe. Results s how that the shifts of R... A new experimental measurement of residual stresses around Vickers′ indentations on the surface of the SiC/Al 2O 3 nanocomposites is proposed with the aid of a Raman microprobe. Results s how that the shifts of R lines in the fluorescence spectra va ry with the distance from the centre of indentation. The magnitude of load appli ed on the surface of the materials through the indenter influences the shifts of R lines to great extent. The luminescence of R lines of the materials before indenting is used to determine the residual stresses around the indentation in the materials, assuming that the stress tensor is transversely isotropic. Final ly, the term of hydrostatic stress is adopted to explain and compare different residual stresses around indentations with the increase of the indenting load an d the distance from the centre of indentations. < 展开更多
关键词 residual stress NANOCOMPOSITE piezospec troscopi c method INDENTATION SiC/Al 2O 3
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A robust method to measure residual stress in micro-structure
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作者 KANG Yi-lan QIU Wei LEI Zhen-kun 《Optoelectronics Letters》 EI 2007年第2期126-128,共3页
An experimental investigation on the residual stress in porous silicon micro-structure by means of micro-Raman spectros- copy is presented. It is shown by detecting the Raman peak shifts on the surfaces and cross-sect... An experimental investigation on the residual stress in porous silicon micro-structure by means of micro-Raman spectros- copy is presented. It is shown by detecting the Raman peak shifts on the surfaces and cross-sections of electrochemical etched porous silicon samples with different porosities that serious residual stresses distribute complicatedly within the whole porous silicon structure. It is proved that micro-Raman spectroscopy is an effective method for residual stress testing on the micro-structures applied in optoelectronics and microelectronics. 展开更多
关键词 微结构 残余应 测量 鲁棒法 光电子 微电子
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