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原子光刻及关键技术分析
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作者 张文涛 《激光与红外》 CAS CSCD 北大核心 2006年第6期427-430,共4页
文章对原子光刻进行了深入的分析,介绍了其基本概念、工作机理、相关实验方案,针对原子光刻的原子捕获、激光稳频、原子束聚焦和沉积等关键技术,进行了分析和探讨。
关键词 原子光刻 纳米结构 原子捕获 激光稳频 原子束沉积
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Multiple Confined-Zone-Based Nickel Hydrogenation Catalyst Made by Shanxi Institute of Coal Chemistry
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《China Petroleum Processing & Petrochemical Technology》 SCIE CAS 2015年第4期19-19,共1页
The Shanxi Institute of Coal Chemistry,Chinese Academy of Sciences has designed and prepared a multiple confined-zone-based nickel hydrogenation catalyst by means of the atomic layer deposition(ALD)technology.In compa... The Shanxi Institute of Coal Chemistry,Chinese Academy of Sciences has designed and prepared a multiple confined-zone-based nickel hydrogenation catalyst by means of the atomic layer deposition(ALD)technology.In comparison with the non-confined-zone based catalyst,the multiple confined-zone-based nickel catalyst possesses an enhanced catalytic reactivity and catalytic stability for hydrogenation of cinnamaldehyde and nitrobenzene. 展开更多
关键词 Shanxi confined hydrogenation reactivity nickel nitrobenzene calcination template synthesize sized
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