Silicon resonant pressure sensors are widely used in aerospace and industry due to their high accuracy,good linearity,and long-term stability.Due to the stress and signal processing limitation,its accuracy is difficul...Silicon resonant pressure sensors are widely used in aerospace and industry due to their high accuracy,good linearity,and long-term stability.Due to the stress and signal processing limitation,its accuracy is difficult to meet the application requirements,and we can only search methods to approach this continuously.This research introduces a stress-isolated structure and a processing method of frequency signal to enhance the index.The stress-isolated structure separates the press-sensor from the printed circuit board by nested bonding for plates with silica gel.It minimizes the transmitted stress but no affect on the electrical connection.The analysis algorithm of frequency based on a given waveform number instead of a given time improves the analytical accuracy of frequency and pressure.By redesigning the interrupt timing control strategy in Microcontroller unit,it addresses sudden jumps of frequency signal.The proposed technique compared to similar schemes,tested on a resonant pressure sensor at a temperature condition of-45℃to 75℃and barometric condition of 3.5 kPa to 110 kPa,reduces the effect of stress effectively,and enhances to 0.01Hz in accuracy of frequency.More importantly there is no sudden jump in frequency signal.The pressure accuracy is increased by 3.5 times to 0.0145%after calibrating.Over-all,the advised method meets the requirement of high accuracy and promotes applications in the aerospace field.展开更多
The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressur...The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0-0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.展开更多
文摘Silicon resonant pressure sensors are widely used in aerospace and industry due to their high accuracy,good linearity,and long-term stability.Due to the stress and signal processing limitation,its accuracy is difficult to meet the application requirements,and we can only search methods to approach this continuously.This research introduces a stress-isolated structure and a processing method of frequency signal to enhance the index.The stress-isolated structure separates the press-sensor from the printed circuit board by nested bonding for plates with silica gel.It minimizes the transmitted stress but no affect on the electrical connection.The analysis algorithm of frequency based on a given waveform number instead of a given time improves the analytical accuracy of frequency and pressure.By redesigning the interrupt timing control strategy in Microcontroller unit,it addresses sudden jumps of frequency signal.The proposed technique compared to similar schemes,tested on a resonant pressure sensor at a temperature condition of-45℃to 75℃and barometric condition of 3.5 kPa to 110 kPa,reduces the effect of stress effectively,and enhances to 0.01Hz in accuracy of frequency.More importantly there is no sudden jump in frequency signal.The pressure accuracy is increased by 3.5 times to 0.0145%after calibrating.Over-all,the advised method meets the requirement of high accuracy and promotes applications in the aerospace field.
文摘The analytical and finite element analyses of circular resonator for Resonant Pressure Sensor are presented. The new idea of this paper is the Silicon circular diaphragm used as the sensing resonator for micro pressure sensor. The thickness, radius and natural frequencies for the Si circular diaphragm are investigated. A system model is being developed to predict dynamic responses of the pressure sensor diaphragm and preliminary results are presented. The pressure range is 0-0.1Mpa. The resonant frequencies output of the homogenous circular diaphragm also realized by ANSYS software. The natural frequency of the resonator is about 63.418 kHz.
