Mo（CO）6 adsorption on the clean, oxygen-precovered and deeply oxidized Si（lll） surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift...Mo（CO）6 adsorption on the clean, oxygen-precovered and deeply oxidized Si（lll） surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo（CO）6 illustrates that different interactions of adsorbed Mo（CO）6 occur on clean Si（111） and SiO2/Si（111） surfaces, weak on the former and strong on the latter. The strong interaction on SiO2/Si（111） might lead to the partial dissociation of Mo（CO）6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo（CO）6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si（111） surface but not on the clean Si（111） surface. A portion of the deposited metallic molybdenum is transformed into the MoOa on the SiO2/Si（111） surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.展开更多
文摘Mo（CO）6 adsorption on the clean, oxygen-precovered and deeply oxidized Si（lll） surfaces was comparatively investigated by high-resolution electron energy loss spectroscopy. The downward vibrational frequency shift of the C-O stretching mode in adsorbed Mo（CO）6 illustrates that different interactions of adsorbed Mo（CO）6 occur on clean Si（111） and SiO2/Si（111） surfaces, weak on the former and strong on the latter. The strong interaction on SiO2/Si（111） might lead to the partial dissociation of Mo（CO）6, consequently the formation of molybdenum subcarbonyls. Therefore, employing Mo（CO）6 as the precursor, metallic molybdenum could be successfully deposited on the SiO2/Si（111） surface but not on the clean Si（111） surface. A portion of the deposited metallic molybdenum is transformed into the MoOa on the SiO2/Si（111） surface upon heating, and the evolved MoO3 finally desorbs from the substrate upon annealing at elevated temperatures.
