Multi-function,multiband,cost-effective,miniaturized reconfigurable radio frequency(RF)components are highly demanded in modern and future wireless communication systems.This paper discusses the needs and implementati...Multi-function,multiband,cost-effective,miniaturized reconfigurable radio frequency(RF)components are highly demanded in modern and future wireless communication systems.This paper discusses the needs and implementation of multiband reconfigurable RF components with microfabrication techniques and advanced materials.RF applications of fabrication methods such as surface and bulk micromachining techniques are reviewed,especially on the development of RF microelectromechanical systems(MEMS)and other tunable components.Works on the application of ferroelectric and ferromagnetic materials are investigated,which enables RF components with continuous tunability,reduced size,and enhanced performance.Methods and strategies with nano-patterning to improve high frequency characteristics of ferromagnetic thin film(e.g.,ferromagnetic resonance frequency and losses)and their applications on the development of fully electrically tunable RF components are fully demonstrated.展开更多
This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by mask...This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.展开更多
This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure t...This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure that nests the proof mass is used to decouple the drive motion and sense motion.This approach ensures that the drive motion is well aligned with the designed drive axis,and minimizes the actual drive motion component along the sense detection axis.The thickness of the structural layer of the device is 100μm,which induces a high elastic stiffness in the thickness direction,so it can suppress the high-order out-of-plane resonant modes to reduce deviation.In addition,the dynamics of the gyroscope indicate that higher driving mass brings about higher sensing displacements.The thick structural layer can improve the output of the device by offering a sufficient mass weight and large sensing capacitance.The preliminary test results of the vacuum packaged device under atmospheric pressure will be provided.The scale factor is 1.316×10^-4 V/（deg/s）,the scale factor nonlinearity and asymmetry are 1.87%and 0.36%,the zero-rate offset is 7.74×10^4 V,and the zero-rate stability is 404 deg/h,respectively.展开更多
基金Projects(1253929,1910853)supported by the National Natural Science Foundation of China。
文摘Multi-function,multiband,cost-effective,miniaturized reconfigurable radio frequency(RF)components are highly demanded in modern and future wireless communication systems.This paper discusses the needs and implementation of multiband reconfigurable RF components with microfabrication techniques and advanced materials.RF applications of fabrication methods such as surface and bulk micromachining techniques are reviewed,especially on the development of RF microelectromechanical systems(MEMS)and other tunable components.Works on the application of ferroelectric and ferromagnetic materials are investigated,which enables RF components with continuous tunability,reduced size,and enhanced performance.Methods and strategies with nano-patterning to improve high frequency characteristics of ferromagnetic thin film(e.g.,ferromagnetic resonance frequency and losses)and their applications on the development of fully electrically tunable RF components are fully demonstrated.
基金Project (No. 61076110) supported by the National Natural Science Foundation of China
文摘This paper presents the design principles and fabrication techniques for simultaneously forming non-coplanar resonant beams and crab-leg supporting beams of dual-axis bulk micromachined resonant accelerometers by masked-maskless combined anisotropic etching.Four resonant beams are located at the surface of a silicon substrate,whereas the gravity centre of a proof mass lies within the neutral plane of four crab-leg supporting beams on the same substrate.Compared with early reported mechanical structures,the simple structure not only eliminates the bending moments caused by in-plane acceleration,and thereby avoiding the rotation of the proof mass,but also providing sufficiently small rigidity to X and Y axes accelerations,potentially leading to a large sensitivity for measuring the in-plane acceleration.
基金supported by the National Natural Science Foundation of China(Nos.6127400l,61006073,61234007)
文摘This paper presents an SOI（silicon on insulator） MEMS（micro-electro-mechanical systems） vibratory gyroscope that was fabricated using bulk micromachining processes.In the gyroscope architecture,a frame structure that nests the proof mass is used to decouple the drive motion and sense motion.This approach ensures that the drive motion is well aligned with the designed drive axis,and minimizes the actual drive motion component along the sense detection axis.The thickness of the structural layer of the device is 100μm,which induces a high elastic stiffness in the thickness direction,so it can suppress the high-order out-of-plane resonant modes to reduce deviation.In addition,the dynamics of the gyroscope indicate that higher driving mass brings about higher sensing displacements.The thick structural layer can improve the output of the device by offering a sufficient mass weight and large sensing capacitance.The preliminary test results of the vacuum packaged device under atmospheric pressure will be provided.The scale factor is 1.316×10^-4 V/（deg/s）,the scale factor nonlinearity and asymmetry are 1.87%and 0.36%,the zero-rate offset is 7.74×10^4 V,and the zero-rate stability is 404 deg/h,respectively.
